Sometimes engineers will use chemicals to clean up of the master on the photoresist or chemical substance, such as hydrogen peroxide, acetonic.
有时工程取一些化品去纯不母盘上的平刻胶或化,如双氧水,丙酮。
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Where the mask blocks the light, the photoresist is unchanged.
在掩模阻挡光线地,光刻胶没有变化。
The wafer is then sent through a hard bake to harden the remaining photoresist.
然后将晶圆送去进行烘烤,以使剩余光刻胶变。
Then, a liquid called " photoresist" is spun on and baked to harden.
接着,一种名为“光刻胶”液体被均匀涂抹并烘烤化。
Wherever the light from the stencil touches the wafer, the photoresist is weakened.
当模板上光线接触到晶圆时,光刻胶就会被削弱。
In the lit areas, a reaction weakens the photoresist's chemical bonds.
在光区域,反应会削弱光刻胶化学键。
To clean up, we use yet another special chemical that washes away any remaining photoresist.
为了清理,我们使用了另一种特殊化学物质来洗掉所有残留光刻胶。
Note that the oxide layer under the photoresist is protected.
请注意,光刻胶氧化层受到保护。
And new problems arise: today, PFAS-based photoresists are essential to make ever-smaller features.
新问题出现了:如今,基于PFAS光刻胶对于制造越来越小特征至关重要。
Once again, we wash away remaining photoresist.
我们再次洗掉剩余光刻胶。
Photoresists aren’t very useful by themselves, but are super powerful when used in conjunction with a photomask.
光刻胶本身不是很有用,但与光掩模结合使用时非常强大。
The wafer is doused in another chemical to wash away that weakened photoresist, leaving an image of the mask.
晶圆会被另一种化学物质冲洗, 以清除那层被削弱光阻剂,留掩模图像。
Once more, we apply a photoresist, and use a new photomask to etch little channels.
再一次,我们应用光刻胶,并使用新光掩模来蚀刻小通道。
Next the wafer is sent to a photoresist stripper where the mask layer is removed.
接来,晶圆被送往光刻胶剥离器,去除掩模层。
The process essentially starts again, first by building up a fresh oxide layer ...which we coat in photoresist.
这个过程基本上又开始了,首先是建立一个新氧化层… … 我们在上面涂上光刻胶。
Next, using UV Light and a stencil, a pattern is applied to the photoresist.
接来,使用紫外线和模板将图案应用到光刻胶上。
These tools include the photoresist spin coater, photolithography tool, developer and photoresist stripper.
这些工具包括光刻胶旋涂机、光刻胶工具、显影剂和光刻胶剥离剂。
The wafer then goes to the developer and the weakened photoresist is washed away, leaving only the patterned nanoscopic stencil on the wafer.
然后, 晶圆进入显影剂, 弱化光刻胶被洗掉,只在晶圆上留图案化纳米级模板。
Next photoresist is spread across the surface and the wafer is sent through a soft bake to remove the solvent.
接来,将光刻胶涂抹在表面,并将晶圆送去软烘烤以去除溶剂。
So, very similar to before, we apply a photoresist, use a photomask, dissolve the exposed resist, and use a chemical to remove any exposed metal.
因此,与之前非常相似, 我们应用光刻胶, 使用光掩模, 溶解暴露抗蚀剂,并使用化学物质去除任何暴露金属。
To start, a layer of insulating silicon dioxide is deposited on top of the wafer and then a layer of light sensitive photoresist is spread across the top.
首先,在晶圆顶部沉积一层绝缘二氧化硅,然后在顶部涂上一层感光光刻胶。
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